Surface charge compensation for a highly charged ion emission microscope
نویسندگان
چکیده
منابع مشابه
Surface charge compensation for a highly charged ion emission microscope.
A surface charge compensation electron flood gun has been added to the Lawrence Livermore National Laboratory (LLNL) highly charged ion (HCI) emission microscope. HCI surface interaction results in a significant charge residue being left on the surface of insulators and semiconductors. This residual charge causes undesirable aberrations in the microscope images and a reduction of the time-of-fl...
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ژورنال
عنوان ژورنال: Ultramicroscopy
سال: 2004
ISSN: 0304-3991
DOI: 10.1016/j.ultramic.2004.06.008